分类： 光学 >> 量子光学 提交时间： 2023-02-19
Yuan Zhou
Zhe Wang
Zhiwei Fang
Zhaoxiang Liu
Haisu Zhang
Difeng Yin
Youting Liang
Zhihao Zhang
Jian Liu
Ting Huang
Rui Bao
Rongbo Wu
Jintian Lin
Min Wang
Ya Cheng
摘要： We demonstrate an on-chip Yb3+-doped lithium niobate (LN) microdisk laser. The intrinsic quality factors of the fabricated Yb3+-doped LN microdisk resonator are measured up to 3.79x10^5 at 976 nm wavelength and 1.1x10^6 at 1514 nm wavelength. The multi-mode laser emissions are obtained in a band from 1020 nm to 1070 nm pumped by 984 nm laser and with the low threshold of 103 {\mu}W, resulting in a slope efficiency of 0.53% at room temperature. Furthermore, the second-harmonic frequency of pump light and the sum-frequency of the pump light and laser emissions are both generated in the on-chip Yb3+-doped LN microdisk benefited from the strong \c{hi}(2) nonlinearity of LN. These microdisk lasers are expected to contribute to the high-density integration of LNOI-based photonic chip.
分类： 光学 >> 量子光学 提交时间： 2023-02-19
摘要： Photolithography assisted chemo-mechanical etching (PLACE), a technique specifically developed for fabricating highquality large-scale photonic integrated circuits (PICs) on thin-film lithium niobate (TFLN), has enabled fabrication of a series of building blocks of PICs ranging from high-quality (high-Q) microresonators and low-loss waveguides to electrooptically (EO) tunable lasers and waveguide amplifiers. Aiming at high-throughput manufacturing of the PIC devices and systems, we have developed an ultra-high-speed high-resolution laser lithography fabrication system employing a high repetition rate femtosecond laser and a high-speed polygon laser scanner, by which a lithography fabrication efficiency of 4.8 cm2/h has been achieved at a spatial resolution of 200 nm. We demonstrate wafer-scale fabrication of TFLN-based photonic structures, optical phase masks as well as color printing
分类： 光学 >> 量子光学 提交时间： 2023-02-19
Yuan Zhou
Yiran Zhu
Zhiwei Fang
Shupeng Yu
Ting Huang
Junxia Zhou
Rongbo Wu
Jian Liu
Yu Ma
Zhe Wang
Jianping Yu
Zhaoxiang Liu
Haisu Zhang
Zhenhua Wang
Min Wang
Ya Cheng
摘要： We demonstrate a robust low-loss optical interface by tiling passive (i.e., without doping of active ions) thin film lithium niobate (TFLN) and active (i.e., doped with rare earth ions) TFLN substrates for monolithic integration of passive/active lithium niobate photonics. The tiled substrates composed of both active and passive areas allow to pattern the mask of the integrated active passive photonic device at once using a single continuous photolithography process. The interface loss of tiled substrate is measured as low as 0.26 dB. Thanks to the stability provided by this approach, a four-channel waveguide amplifier is realized in a straightforward manner, which shows a net gain of ~5 dB at 1550-nm wavelength and that of ~8 dB at 1530-nm wavelength for each channel. The robust low-loss optical interface for passive/active photonic integration will facilitate large-scale high performance photonic devices which require on-chip light sources and amplifiers.
分类： 光学 >> 量子光学 提交时间： 2023-02-19
Youting Liang
Junxia Zhou
Rongbo Wu
Zhiwei Fang
Zhaoxiang Liu
Shupeng Yu
Difeng Yin
Haisu Zhang
Yuan Zhou
Jian Liu
Zhenhua Wang
Min Wang
Ya Cheng
摘要： We overcome the difficulty in realizing a monolithic waveguide-coupled microring laser integrated on erbium-doped thin film lithium niobate (Er: TFLN) using photolithography assisted chemo-mechanical etching (PLACE) technique. We demonstrate an integrated single-frequency microring laser operating around 1531 nm wavelength. The PLACE technique, enabling integrated Er: TFLN photonics with low propagation loss, can thus be used to realize low cost mass production of monolithic on-chip microlasers with applications ranging from optical communication and photonic integrated circuit (PIC) to precision metrology and large-scale sensing.
分类： 光学 >> 量子光学 提交时间： 2023-02-19
Difeng Yin
Yuan Zhou
Zhaoxiang Liu
Zhe Wang
Haisu Zhang
Zhiwei Fang
Wei Chu
Rongbo Wu
Jianhao Zhang
Wei Chen
Min Wang
Ya Cheng
摘要： We demonstrate monolithic integration of an electro-optically (EO) tunable microring laser on lithium niobate on insulator (LNOI) platform. The device is fabricated by photolithography assisted chemo-mechanical etching (PLACE), and the pump laser is evanescently coupled into the erbium (Er3+) doped LN microring laser using an undoped LN waveguide mounted above the microring. The quality factor of the LN microring resonator is measured as high as 1.54x10^5 at the wavelength of 1542 nm. Lasing action can be observed at a pump power threshold below 3.5 mW using a 980 nm continuous-wave pump laser. Finally, tuning of the laser wavelength is achieved by varying the electric voltage on the microelectrodes fabricated in the vicinity of microring waveguide, showing an EO coefficient of 0.33 pm/V.
分类： 光学 >> 量子光学 提交时间： 2023-02-19
Youting Liang
Junxia Zhou
Zhaoxiang Liu
Haisu Zhang
Zhiwei Fang
Yuan Zhou
Difeng Yin
Jintian Lin
Jianping Yu
Rongbo Wu
Min Wang
Ya Cheng
摘要： Erbium doped integrated waveguide amplifier and laser prevail in power consumption, footprint, stability and scalability over the counterparts in bulk materials, underpinning the lightwave communication and large-scale sensing. Subject to the highly confined mode and moderate propagation loss, gain and power scaling in such integrated micro-to-nanoscale devices prove to be more challenging compared to their bulk counterparts. In this work, stimulated by the prevalent success of double-cladding optical fiber in high-gain/power operation, a Ta2O5 cladding is employed in the erbium doped lithium niobate (LN) waveguide amplifier fabricated on the thin film lithium niobate on insulator (LNOI) wafer by the photolithography assisted chemomechanical etching (PLACE) technique. Above 20 dB small signal internal net gain is achieved at the signal wavelength around 1532 nm in the 10 cm long LNOI amplifier pumped by the diode laser at ~980 nm. Experimental characterizations reveal the advantage of Ta2O5 cladding in higher optical gain compared with the air-clad amplifier, which is further explained by the theoretical modeling of the LNOI amplifier including the guided mode structures and the steady-state response of erbium ions.
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