Design of a full-filed transmission X-ray microscope with 30nm resolution

分类： 光学 >> 显微镜 提交时间： 2023-11-15

Keliang Liao Qili He Panyun Li Maohua Song Peiping Zhu

摘要： Afull-field transmissionhardX-ray microscope (TXM) with 30nm resolution was designed and its prototype was constructed. The TXM relies on a compact, high stiffness, low heat dissipation and low vibration design philosophy and utilizes Fresnel Zone plate (FZP) as imaging optics. The design of the TXMwas introduced in detail, including the optical layout, the parameters of the FZP, the mechanical design of the TXM instrument. Preliminary imaging result with 52nm spatial resolution was achieved.

通过

 点击量 1746  下载量 202  评论 0