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2023
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辐射物理与技术
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Lei,Zhidi
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Li,Beining
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Li,Zhenjiang
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Qi,Chenghang
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Shi,Hao
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Wang,Lu
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Wu,Yanqing
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College of Materials Science and Opto-Electronic Technology University of Chinese Academy of Sciences Beijing 100083, China
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Key Laboratory of Materials for High Power Lasers Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences Shanghai 201800, China
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Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China
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Shanghai Synchrotron Radiation Facility, Shanghai 201204, China
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Shanghai University, Shanghai 200444
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ShanghaiTech University, Shanghai 201210
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University of Chinese Academy of Sciences, Beijing 100049, China
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Qi,Chenghang
1. ChinaXiv:202311.00255
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Latest Developments in EUV Photoresist Evaluation Capability at Shanghai Synchrotron Radiation Facility
分类:
核科学技术
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辐射物理与技术
提交时间:
2023-11-24
Li,Zhenjiang
Qi,Chenghang
Li,Beining
Yang,Shuming
Zhao,Jun
Lei,Zhidi
Zhu,Shijie
Shi,Hao
Wang,Lu
Wu,Yanqing
Tai,Renzhong
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