Subjects: Materials Science >> Nanoscience and Nanotechnology submitted time 2016-12-23
Abstract：A novel double gate AlGaN/GaN HEMT, in which an additional top-gate covers the adjacent regions of normal gate, was proposed and fabricated for the first time to compare the dynamic characteristics of AlGaN/GaN HEMTs with source field plate(SFP) and gate field plate(GFP). During the dynamic characterization, the device was configured in two operation modes, one is the source-field-plate mode (SFP-mode) with the top gate biased at 0V, another is the gate-field-plate mode (GFP-mode) with applying the gate pulse signal on the top gate at the same time. Compared to an AlGaN/GaN HEMT without field plates, both GFP and SFP much improve the dynamic performances. Compared to SFP, the GFP shows better dynamic performances with a ~34% reduction of switch-on delay time and ~6% reduction of dynamic on-resistance. By study of the dynamic characteristics with applying negative voltage on the top gate during off-state, the mechanism differences between GFP and SFP are discussed in detail.
Peer Review Status:
Awaiting Review
Subjects: Materials Science >> Nanoscience and Nanotechnology submitted time 2016-12-22
Zhili Zhang
Kai Fu
Xuguang Deng
Xiaodong Zhang
Yaming Fan
Shichuang Sun
Liang Song
Zheng Xing
Wei Huang
Guohao Yu
Yong Cai
Baoshun Zhang
Abstract：This paper presents a fabrication technology of enhancement-mode (E-mode) AlGaN/GaN metal insulator semiconductor high electron-mobility transistors (MIS-HEMTs) using 10 keV fluorine ion implantation. An 8 nm low pressure chemical vapor deposition (LPCVD) silicon nitride layer was deposited on the AlGaN as gate dielectric and energy-absorbing layer that slows down the high energy (10 keV) fluorine ions to reduce the implantation damage. The E-mode MIS-HEMTs exhibit a threshold voltage as high as 3.3 V with a maximum drain current over 200 mA/mm (250 mA/mm for depletion-mode (D-mode) MIS-HEMTs) and a high on/off current ratio of 109. Meanwhile, the E-mode MIS-HEMTs dynamic RON is only 1.53 times than the static RON after off-state VDS stress of 500 V.
Peer Review Status:Awaiting Review
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