分类: 核科学技术 >> 粒子加速器 提交时间: 2023-06-18 合作期刊: 《Nuclear Science and Techniques》
摘要: An ion beam analysis system was established on a 1.7 MV tandem accelerator, enabling Rutherford backscattering (RBS), elastic recoil detection (ERD), nuclear reaction analysis (NRA) and channeling measurements. The system was tested by performing qualitative and quantitative analysis of Si, Ni/Si, BiFeO3:La/Si, MoC/Mo/Si and TiBN/Si samples. RBS of a BiFeO3:La film was used as system calibration. Tested by ion beam channeling, a Si(100) is of good crystallinity (min = 3.01%). For thin film samples, the measured thickness agrees well with simulation results by SIMNRA. In particular, composition of a MoC/Mo/Si and TiBN film samples were analyzed by RBS and non-Rutherford elastic backscattering.