Hydrofluoric acid-based etching effect on the surface pit, crack, scratch, and laser damage site of fused silica optics

分类： 化学 >> 化学物理学 提交时间： 2018-11-28

Taixiang Liu Ke Yang Zhuo Zhang Lianghong Yan Beicong Huang Heyang Li Chuanchao Zhang Xiaodong Jiang Hongwei Yan

摘要： Large-scale, high-power laser facility is currently a basis for the research of inertial confinement fusion (ICF). In the laser facility, fused silica optics plays irreplaceable role to conduct extremely high-intensity ultraviolet laser to fusion target. However, the surface fractures, such as surface pit, crack, scratch, and laser damage site, of the optics will lower the beam quality of transmitted laser, weaken the laser damage-resistance, shorten the lifetime of the optics, and thus limit the output performance of the laser facility. In this work, to mitigate the surface fractures, hydrofluoric acid-based (HF-based) etching effect on the surface fractures is experimentally and theoretically studied. From the experimental study, with the result of three-dimensional (3D) morphological evolution of surface fractures, it is shown that the surface fractures will be passivated and their profiles will get smoothed after etching, indicating HF-based etching is a promising way to improve the local surface quality of the fractures. Especially, it is found HF-based etching can greatly suppress the laser damage growth of laser damage site by mitigating its surface and subsurface fractures, and thus is a promising wet chemical method for repairing laser-induced damage optics. In the theoretical study, an explicit local-curvature dependent etching model is proposed. Based on this model, the result from finite difference time domain (FDTD) simulation agrees very well with that of experiment, which can reveal the detailed physical process of HF-based etching. It is demonstrated that the FDTD simulation can be a reliable and efficient way to predict the morphological evolution of the surface fractures during etching.

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